Specification:
1. 6inch/8inch Stainless Vacuum Chuck

2. Vacuum On-OFF Switches to control each ring

3. Huge-Knob Chuck Stage X-Y Line Fine movement  

distance 6”x6”/8”x8”, resolution 2μm

4. Fast Pull-out Y stage for easy Loading/Unloading

5. Chuck theta rotation 0°～360° manual

6. Microscope mount X-Y Line travel 2”x2”

Z Line Fine Up-Down 50mm,resolution 1μm

7. Microscope Total Mag. 14X~135X

8. Upgrade: CCD Monitor, Thermal Chuck, Vibration Isolation Table, Shielding Box, Probe Card Holder